12

Nanofabrication based on MEMS technology

Year:
2006
Language:
english
File:
PDF, 3.17 MB
english, 2006
18

Micromachined Thermopile IR Detector Module With High Performance

Year:
2011
Language:
english
File:
PDF, 316 KB
english, 2011
21

A MEMS device forin-situTEM test of SCS nanobeam

Year:
2008
Language:
english
File:
PDF, 838 KB
english, 2008
27

Micromachined thermoelectric IR sensors fabricated by a self-aligned process

Year:
2011
Language:
english
File:
PDF, 204 KB
english, 2011
31

The structures for electrostatic servo capacitive vacuum sensors

Year:
1998
Language:
english
File:
PDF, 585 KB
english, 1998
41

A cost-effective flexible MEMS technique for temperature sensing

Year:
2007
Language:
english
File:
PDF, 423 KB
english, 2007
42

Friction and wear properties in MEMS

Year:
2002
Language:
english
File:
PDF, 93 KB
english, 2002
43

Design and analysis of the film assembly of thermo-optic infrared focal plane arrays

Year:
2009
Language:
english
File:
PDF, 642 KB
english, 2009
45

Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining

Year:
2012
Language:
english
File:
PDF, 827 KB
english, 2012